METHOD AND STATION FOR TREATMENT OF A TRANSPORT CONTAINER MADE OF PLASTIC MATERIAL FOR THE ATMOSPHERIC STORAGE AND CONVEYANCE OF SUBSTRATES
A method for treatment of a plastic transport box for conveyance and atmospheric storage of substrates including walls bounding a volume intended for storage of substrates, and a station for treatment of transport boxes for conveyance and atmospheric storage of substrates, the method including: at least one plasma treatment in which at least one interior wall of the transport box is subjected to a plasma of a treatment gas at a gas pressure lower than 10000 pascals.
» Number: US2017182526A1 (A1)
» Publication Date: 29/06/2017
» Applicant: PFEIFFER VACUUM?[FR]
» Inventor: PALISSON JULIEN?[FR]; LE GUET CATHERINE?[FR]
This project has received funding from the European Union's Horizon 2020 research and innovation programme under grant agreement Nº 768737